Deposition yield and enhancing factor
收藏Figshare2025-05-19 更新2026-04-08 收录
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https://figshare.com/articles/dataset/Deposition_yield_and_enhancing_factor/29097722/1
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资源简介：
The enhancement factor Y based on mean power obtained as the ratio between deposition rate of pulse and DC power delivery. The error bars represent the standard deviation offor the 5 different pressure conditions. The deposition yield, i.e., the mass of produced nanoparticles per unit of energy (µg/Wh) for varied pressure and power, delivered by either DC or pulsed sputtering.
提供机构：
Čurda, Pavel
创建时间：
2025-05-19
