Dataset for Hybrid Approach to Reconstruct Nanoscale Grating Dimensions using Scattering and Fluorescence with Soft X-rays

This dataset accompanies the paper titled "Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays" available on arXiv. It includes measurement data, optimization results and fit data collected from a nanoscale grating with a soft X-ray fluorescence scatterometer, a model of the experiment and weighted, combined regression.