mdpi-plasma-2022

Dataset related to the simulation of the first 2 microseconds of a RF-CCP discharge at 13.56 MHz, 66.6 Pa, RF peak bias voltages 100-400 V. These data have been used for an article titled "Simulation of the first two microseconds of an Ar CCP cold plasma discharge by the PIC-MCC method" submitted to the journal <em>Plasma</em>. The archive contains seven directories, one for each value of the peak bias voltage. Inside each of these directories one or more sub-directory may exist, each one containing the output of a single simulation run. These are the names of the files contained in each subdirectory and their content <em>ccpla.conf</em>: configuration used for the simulation <em>ccpla.neutrals</em>: neutral gas characteristics <em>ccpla.V.csv</em>: electric potential (each row is related to a different time) <em>ccpla_eedf.csv</em>: electron energy distribution function (each row is related to a different time) <em>ccpla_means_ele.csv</em>: several electron properties (each row is related to a different time)