Aerial image data measured by lithography tools
收藏科学数据银行2023-02-17 更新2026-04-23 收录
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https://www.scidb.cn/detail?dataSetId=19aa446654c84b9e8a8e24c60365e1c0
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资源简介：
Use the aerial image sensor integrated on the worktable to collect the aerial images marked by 0 ° and 90 ° masks. Repeat acquisition for three times for each view point.
提供机构：
Shanghai Institute of Optics and Fine Mechanics
创建时间：
2023-02-16
