Research data supporting "Modelling focused electron beam induced deposition beyond Langmuir adsorption"

Data files supporting publication "Modelling focused electron beam induced deposition beyond Langmuir adsorption". The files included are: (1) multilayer_FEBID_solution_maps.nb (2) FEBID_Frequency_tool.xlsx File (1) Is a Wolphram Mathematica notebook, which is used to analytically solve the Multilayer FEBID model and generate normalized frequency maps where different regimes can be identified. This file was developed and tested using Version 11.0.0.0 of Wolphram Mathematica. File (2) is a Microsoft Excel Spreadsheet which can be used to calculate characteristic FEBID frequencies as a function of experimental parameters. This file was developed using the Package Microsoft Office 2016.