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3D-Imaging and Quantitative Subsurface Dielectric Constant Measurement Using Peak Force Kelvin Probe Force Microscopy

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Zenodo2023-10-03 更新2026-05-26 收录
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We demonstrate a new approach to simultaneously measure the dielectric constants of buried structures and interfaces by combining peak force tapping quantitative Nano-mechanical mapping (PF QNM) and frequency-modulated Kelvin probe force microscopy (FM-KPFM). The developed method paves the way for 3D-imaging of dielectric constants of composite materials and heterostructures.

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Zenodo
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2023-10-03
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