Supplementary research data for the thesis "Comprehensive insights into the impedimetric characterization of dielectric thin films"

### Supplementary Research Data for the dissertation ### "Comprehensive insights into the impedimetric characterization of dielectric thin films" ### by Benedikt Sapotta Important: The impedance spectra are disclosed as .DTA files which can be accessed with e.g. the text editor ### Content #### 1 Estimation of IDE cell constant - python script to calculate an IDE cell constant based on https://doi.org/10.1016/0925-4005(95)85053-8 #### 2 Estimation of effective permittivity of coated IDE - python script to calculate the effective permittivity of a coated IDE structure base on https://doi.org/10.1016/j.sna.2011.09.033 and https://doi.org/10.1016/j.sna.2004.01.040 - functionality of the python script is demonstrated by reproducing figure 7 and 8 from https://doi.org/10.1016/j.sna.2011.09.033 #### 3 Uncoated IDE data - light and scanning electron micrographs of the uncoated IDE structures - impedance spectra discussed in chapter 5.2 together with the data fit results using ECM 1 - impedance spectra and evaluation procedure discussed in chapter 5.3 - python scripts to compute the reference conductivities "Expected Conductivities.py" and reference permittivities "Expected Permittivities.py" - data fit results to the aqueous KCl solutions copied into an excel file - python script to compute the capacitance C\_Par+C\_Geo from the DRM impedance spectra "Capacitance\_Calculator.py" - python script to compute the relative permittivities of the DRMs from C\_Par+C\_Geo "Permittivity\_Calculator.py" - python script to compute the electrolytic condudctivity of the CRMs from the R\_E best fit estimates "Conductivity\_Calculator.py" #### 4 HKUST\-1 coated IDE data - data and evaluation procedures for the coated 5 µm electrode chip discussed in chapter 6.1 - impedance spectra collected with the - DRMs: 1-butanol, ethanol and air to obtain C\_Par and K\_Cell of the electrode chip - linker precursor solution as a function of the growth cycles (1-205) - metal precursor solution as a function of the growth cycles (1-205) - ECM 2 fit results to the metal and linker data copied into the excel file "ECM\_2\_BatchFit\_Results.xlsx" - an animated bode plot of the linker and metal impedance spectra - python script for the monte carlo modelling to obtain the coating permittivities and thickness based on the impedance data "MC\_modelling\_growth\_data.py" - a simplified data flow chart as .png to facilitate the understanding of "MC\_modelling\_growth\_data.py" - an assortment of scanning electron micrographs depicting the coated IDE structures - data and evaluation procedures for the coated 10 µm electrode chip discussed in chapter 6.2 - python script which was used for the automated uptake of impedance spectra during the HKUST-1 coating process "SURSENSOR.py" - impedance data (FS= full impedance spectrum, SF= single frequency impedance data) collected with the - DRMs: 1-butanol, ethanl and air to obtain C\_Par and K\_Cell - linker precursor solution as a function of the growth cycle (1-200) - spectra were recorded after the 300, 600 and 900 seconds after the initial exposure to the linker solution, only the 900 s data was evaluated - single frequency impedance data was recorded during the initial 300 seconds of the linker solution exposure step at 100 kHz - metal precursor solution as a function of the growth cycle (1-200) - spectra were recorded after 200, 400 and 600 seconds after initial exposure to the metal solution, only the 600 s data was evaluated - single frequency impedance data was recorded during the initial 200 seconds of the metal solution exposure step at 100 kHz - testing solutions as a function of the growth cycle - spectra were recorded after 180, 240 and 300 seconds after initial exposure to the respective testing solution, only the 300 s data was evaluated - single frequency impedance data was recorded during the initial 180 seconds of each testing solution exposure step at 1 MHz - ECM 2 fit results to the metal and linker data copied into the excel file "Growth\_Data\_BatchFit\_Results.xlsx" - ECM 1 fit results to the testing solution spectra recorded before the HKUST-1 coating process copied into the excel file "Cycle\_0\_DataFits.xlsx" - ECM 2 fit results to the testing solution spectra recorded with the HKUST-1 coated electrode structure copied into the excel files "Cycle\_50DataFits.xlsx", "Cycle\_100\_Data\_Fits.xlsx", "Cycle 150 Data Fits.xlsx" and "Cycle\_200DataFits.xlsx", - python script for the monte carlo modelling to obtain the coating permittivities and conductivities during the exposure with the testing solutions "MC\_modelling\_testing\_data.py" which is an extension of "MC\_modelling\_growth\_data.py" - a simplified data flow chart as .png to facilitate the understanding of "MC\_modelling\_testing\_data.py" - python scripts to compute the testing solution permittivities "Medium\_RelativePermittvity\_Calculator.py" and conductivities "Medium\_Conductivity\_Calculator.py" - an assortment of scanning electron micrographs depicting the coated IDE structures #### 5 ZIF\-8 coated IDE data - impedance spectra collected with the - uncoated 10 µm electrode chips and the DRMs: 1-butanol, ethanol and air to obtain C\_Par and K\_Cell - ZIF-8 coated 10 µm electrode chip and the testing media: air, ethanol and 1 mM KCl dissolved in ethanol - an assortment of scanning electron micrographs depicting the ZIF8-coating on the IDE structures as well as on the silicon and gold surfaces