Data supporting publication: Fabrication Optimization of van der Waals Metasurfaces: Inverse Patterning Boosts Resonance Quality Factor

Funded by the European Union (ERC, METANEXT, 101078018). Views and opinions expressed are however those of the author(s) only and do not necessarily reflect those of the European Union or the European Research Council Executive Agency. Neither the European Union nor the granting authority can be held responsible for them. This project was also funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under grant numbers EXC 2089/1–390776260 (Germany’s Excellence Strategy) and TI 1063/1 (Emmy Noether Program), the Bavarian program Solar Energies Go Hybrid (SolTech) and the Center for NanoScience (CeNS). S.A.M. additionally acknowledges the Lee-Lucas Chair in Physics.