Experimental files for Influence of radiation spectral characteristics on the accuracy of optical coherence tomography (oct) using a laser-plasma source of soft x-rays and extreme ultraviolet.

An analysis of specific spectra manipulation and its metrological consequences for optical coherence tomography (OCT) in the nanometre wavelength range using a laser-plasma source of soft X-rays (SXR) and extreme ultraviolet (EUV). The focus is on extending the recorded spectra, predominantly through the stitching method. A model spectrum is used to validate the technique and transparently demonstrate the behaviour of the stitched spectral components. The model is followed by processing the experimental data and demonstrating two possible destructive factors for data processing. The first is an unbalanced spectrum. Although spectral extension toward higher photon energies significantly improves spatial resolution, it appears to be a second destructive factor. The results presented also highlighted certain technological and physical issues related to the material properties of the sample, such as potential plasmonic effects. Consequently, the results, although offering much greater flexibility and ability to adjust the final spectrum and providing better reconstruction, also recommend caution in the scope and choice of the applied modification method. The dataset contains physical and optical parameters of materials, in the extreme ultraviolet regime, used in the experiment and simulations for OCT measurements. It includes experimental spectrometer data obtained using OCT experimental set up for SXR and EUV radiation. It has reflectivity files of modelled Au layers (5 nm and 10 nm) buried in the silicon substrate after correction resulting from material dispersion. It contains all the figures used in the article as results. Work supported by the National Science Centre, Poland, Preludium Project Grant Agreement No. UMO-2021/41/N/ST7/03198