Parametric study on the femtosecond laser ablation of silicon nitride

This dataset contains a structured table from a femtosecond-laser parametric study on silicon nitride. It features input parameters alongside the measured notch geometry. This dataset supports correlation analyses, modelling, and optimisation aimed at achieving target notch geometries through parameter tuning.
• Materials and system
o Material: Silicon nitride (SL200 by CeramTec GmbH).
o Laser system: microPREP™ PRO FEMTO by 3D-Micromac AG.
o Process: Femtosecond laser ablation using rectangular area scans.
• File format and structure
o Format: Excel (.xlsx).
o Organisation: One sheet (i.e., “SL200 Parameter Study”).
o Rows: Individual experiments (one parameter setting per row & the corresponding results).
o Columns: Input parameters, and measured geometry (see “Parameters” below).
• Dataset
o Parameters: Area length | Area width | Power | Pulse frequency | DLFS | PD | LD | Repetitions | Focus shift | CO2-cleaning | Notch depth | Notch root radius | Opening angle | Width | Comments
o A full description of all parameters is given in the file “Parameter_description.pdf”.
o Units for the parameters are given in the column headers.
o Aim: The data was used to analyse the general effect of different laser parameters on the resulting notch geometry.