TCAD simulation of Polarization-Voltage curve of a 10 nm ferroelectric HZO capacitor, including model parameters calibrated on experimental data

This dataset contains: Simulated results of Polarization-Voltage curve of a 10 nm ferroelectric HZO capacitor Information about simulator and model used Calibrated model parameters More information can be found in the README.txt file. This calibrated model has been presented and used in the publications: 10.1109/ACCESS.2025.3561255, 10.1109/EDTM61175.2025.11040846 and 10.1109/JEDS.2026.3697979