Dataset for Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing
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下载链接：
https://eprints.soton.ac.uk/505597/
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资源简介：
This dataset contains all data and method description to support the publication of "Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing". The dataset includes parameters for film deposition and the measurement data of these fabricated films. There are also microscope images and scanning electron microscope images of the films after mechanical dicing.
提供机构：
University of Southampton
创建时间：
2025-10-15
