SPAD electrical characterization data underlying the PhD thesis "Quantum sensing and fabrication of color centers in diamond: Toward a quantum biosensor based on CMOS-integrated NV centers"

Electrical characterization measurements of a SPAD array. This SPAD array has been fabricated in 40 nm CMOS technology by TSMC, and is intended to be used as a photon collection module in an integrated quantum biosensor, using nitrogen-vacancy centers in diamond. The control code, including FPGA, Arduino, and Python modules, can be found in the GitHub of the author (https://github.com/ynsvrv/ODMR_and_SPAD_control_software). The data was acquired via standard IV probe measurements and CV measurements in the EKL facility of EWI, TU Delft. The data is in the form of .CSV, .PNG.

本数据集为单光子雪崩二极管（Single-Photon Avalanche Diode，SPAD）阵列的电学特性表征测量结果。该SPAD阵列由台积电（TSMC）采用40纳米互补金属氧化物半导体（Complementary Metal-Oxide Semiconductor，CMOS）工艺制备，旨在作为光子收集模块应用于基于金刚石氮空位中心的集成量子生物传感器。包含现场可编程门阵列（Field-Programmable Gate Array，FPGA）、Arduino及Python模块在内的控制代码可在作者的GitHub仓库中获取，地址为https://github.com/ynsvrv/ODMR_and_SPAD_control_software。本数据集通过代尔夫特理工大学EWI院系的EKL实验设施完成标准电流-电压（IV）探针测量与电容-电压（CV）测量采集。数据格式为CSV与PNG文件。