Artificial Neural Network Assisted Spectral Scatterometry For Grating Quality Control

Data related to the ANN assisted spectral scatterometry project. The dataset contains the simulated and measured diffraction efficiencies with which the ANN was trained (A/B/C_training files). In addition there are diffraction efficiencies that are simulated using the specifications of the measured samples (v1_A/B_256.h5), the spectrum of the light source, uncertainty calculations, and the trained ANN itself (TLModel_4.13) created using Tensorflow and Keras for Python.