Data for: Sputtering of polished EUROFER97 steel: surface structure modification and enrichment of tungsten and tantalum

Raw ToF-ERDA data from all samples, both as list files (.lst) and and data files (.mpa) from the acquisition system MPA-3. Filenames starting with "Eurofer" contain data taken after polishing of a collimator in the setup. Remaining data shows an aluminum signal which is an artifact due to scattering from impurities accumulated on said collimator.