Dataset accompanying the manuscript "Multi-Method Electrical Characterisation of Thin Indium Tin Oxide Films: Structuring and Calibration Sample Development for Scanning Probe Microscopy", which will be submitted to PSSA.

This dataset accompanies the manuscript which will be submitted to PSSA: Ermilova, E., Hülagü, D., Weise, M.,de Préville, S., Hoffmann, J., Morán-Meza, J., Piquemal, F., Hertwig, A., "Multi-Method Electrical Characterisation of Thin Indium Tin Oxide Films: Structuring and Calibration Sample Development for Scanning Probe Microscopy". It contains spectroscopic ellipsometry (SE) measurements and modelling data of ITO films, as well as electrical properties of these samples obtained by four-point probe method (4PM). The sheet resistance measurements of the microstructured ITO films determined by scanning microwave microscopy (SMM) are also presented here.