Data for each of the four panels in Fig 1, including period, LER, LWR, correlation length, and defect density.
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下载链接：
https://figshare.com/articles/dataset/_Data_for_each_of_the_four_panels_in_Fig_1_including_period_LER_LWR_correlation_length_and_defect_density_/1494148
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资源简介：
Units are in nm, except for defect density, which is given as defect pairs per μm2. Line-edge roughness (LER) is given as three times the standard deviation (3σ) in the edge position, relative to the center of the line; line-width roughness (LWR) is three times the standard deviation (3σ) in the width of the line.
Data for each of the four panels in Fig 1, including period, LER, LWR, correlation length, and defect density.
创建时间：
2015-07-24
