Data supporting the publication: Tailored Waveform Biasing in Atomic and Molecular Plasmas for Atomic Scale Processing

This is data supporting the publication titled 'Tailored Waveform Biasing in Atomic and Molecular Plasmas for Atomic Scale Processing' which is published in the Journal of Vacuum Science and Technology A. The data consist of ion energy distribution function as measured by the RFEA probe and waveform data measured by an oscilloscope. Both these data types are stored as csv file. The name of the csv file corresponds to the Figure name in the publication, with a parameter given for exact identification.