Bowtie Dataset
收藏DataCite Commons2025-09-16 更新2026-04-25 收录
下载链接：
https://www.osti.gov/servlets/purl/2588625
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资源简介：
This dataset contains over 3,600 image files of images of a semiconductor manufactured part called 'Bowtie'. The data is grouped into 'accept' and 'reject' but does not contain masks for why the inspector rejected a part. There are further groupings such as different zoom magnifications, types of rejection (e.g. gouge, debris, etc.). Some of the parts have been laminated and are organized as such. For the 2nd round of data also included are Excel spreadsheets which can be used to identify position on the wafer where the images came from. The included PDF has example images and explains this in more detail.
提供机构：
Los Alamos National Laboratory (LANL)
创建时间：
2025-09-16
