Results of calibration of the piezoelectric scanner using the probe TGQ1
收藏Most Wiedzy Open Research Data Catalog2026-04-17 收录
下载链接：
https://mostwiedzy.pl/en/open-research-data/results-of-calibration-of-the-piezoelectric-scanner-using-the-probe-tgq1,428035759459990-0
下载链接
链接失效反馈官方服务：
资源简介：
Teaching file. Results of calibration of the piezoelectric scanner using the probe TGQ1. Scanning in contact mode. NTEGRA Prima (NT-MDT) device. CSG probe 10.
Most microscopes with a scanning probe base their operation on the use of piezoelectric scanners, which allow the probe to be moved in relation to the tested surface. The correct operation of the above-mentioned elements is of key importance for the reliability of the obtained topographic images. In order to verify the quality of their operation, calibration samples with a specific geometry are used. By comparing the obtained images with the known surface profile, it is possible to determine and correct deviations in the operation of piezoelectric elements. In the described case, a tester in the form of a silicon wafer was used with marked square peaks 20 nm high and 1.5 µm long, spaced periodically at a distance of 3 µm. The file contains 3 images.
提供机构：
Artur Zieliński
