Current density and Voltage waveforms
收藏DataCite Commons2025-05-19 更新2025-09-08 收录
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https://figshare.com/articles/dataset/Current_density_and_Voltage_waveforms/29087180/1
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Current density and voltage waveforms under pulsed sputtering conditions for different repetition frequencies and active times. The horizontal dotted lines indicate reference values for DC sputtering at an equivalent mean power. All data shown were acquired with a mean discharge power of 40 W.
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figshare创建时间：
2025-05-19
