Dataset for "AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy"
收藏DataCite Commons2024-09-19 更新2025-04-17 收录
下载链接：
https://researchdata.bath.ac.uk/id/eprint/703
下载链接
链接失效反馈官方服务：
资源简介：
This dataset contains scanning electron microscopy (SEM) images of nano-pillar-patterned sapphire created via Displacement Talbot Lithography and Inductively coupled plasma dry etching.
提供机构：
University of Bath
创建时间：
2019-11-18
