雪崩光电二极管(APD)版图
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本项目中的APD采用了波导形式的设计,该设计方式可以在不影响灵敏度的情况下独立优化带宽与耦合插损。APD的优化与调制器类似,主要通过结构与掺杂来实现。结构优化包括了波导的宽度,长度以及锗生长的厚度;掺杂优化主要涉及浓度与PN结的位置。目前,我们的响应度可以达到8.2A/W,可以满足该项目灵敏度的需求。3dB带宽达到28GHz,大大优于项目21GHz需求。
The APD in this project adopts a waveguide-based design, which enables independent optimization of bandwidth and coupling insertion loss without compromising sensitivity. The optimization of APD is similar to that of modulators, which is mainly realized through structural and doping modifications. Structural optimization covers the width, length of the waveguide, and the growth thickness of germanium; doping optimization mainly involves the doping concentration and the position of the PN junction. Currently, our responsivity reaches 8.2 A/W, which meets the sensitivity requirement of this project. The 3-dB bandwidth reaches 28 GHz, which greatly exceeds the project's required 21 GHz.




