Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition
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https://springernature.figshare.com/articles/dataset/Competitive_co-diffusion_as_a_route_to_enhanced_step_coverage_in_chemical_vapor_deposition/26934448/1
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资源简介：
Raw data for materials characterization, growth rates, and step coverage
提供机构：
Choolakkal, Arun Haridas; Niiranen, Pentti; Dorri, Samira; Birch, Jens; Pedersen, Henrik
创建时间：
2024-12-12
