验证无损测量系统性能指标过程中采集的数据

在对项目所研发的近红外低相干显微干涉测量系统进行性能指标的验证过程中，所采集到的各类待测微结构样品通过项目所研发的近红外低相干显微干涉测量系统对任一待测微结构样品进行检测，所采集得到一系列纵向扫描步长下的低相干显微干涉图像，对干涉图像进行实验系统视场内每一采样点在一系列纵向扫描步长下的干涉强度值的提取，得到所有采样点的纵向扫描相干信号强度分布数据；根据相干信号数据，采用解调算法可复原得到相应的微结构形貌数据。对该无损测量系统的测试报告由第三方中国计量科学研究院提供。During the performance verification of the near-infrared low-coherence microscopic interferometry system developed by this project, various microstructured samples under test were measured using the developed system. For each individual sample, a series of low-coherence microscopic interferograms under different longitudinal scanning step sizes were acquired. By extracting the interference intensity values of each sampling point within the field of view of the experimental system across all longitudinal scanning steps from the obtained interferograms, the longitudinal scanning coherent signal intensity distribution dataset for all sampling points was generated. Based on this coherent signal dataset, the corresponding microstructure topography data can be reconstructed using a demodulation algorithm. The test report for this non-destructive measurement system was provided by the National Institute of Metrology of China, a third-party institution.

搜集汇总

背景与挑战

背景概述

该数据集采集于近红外低相干显微干涉测量系统性能指标验证过程，包含对微结构样品检测得到的干涉图像和相干信号强度分布数据，用于形貌复原分析，并由中国计量科学研究院提供第三方测试报告。