The mechanical properties of films
收藏DataCite Commons2025-12-03 更新2026-05-05 收录
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资源简介：
The mechanical properties (including hardness, adhesion, and stress) of aluminum fluoride films and aluminum oxide films deposited on different substrates (JGS1 and Si) were characterized.
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Science Data Bank
创建时间：
2025-12-03
