Properties of a refractory high entropy HfMoNbTaTiVWZr thin film metallic glass implanted with nitrogen ions

This dataset contains experimental data related to the study of the mechanical, tribological, and microstructural properties of a refractory high-entropy metallic glass (RHEMG) thin film with the composition HfMoNbTaTiVWZr subjected to nitrogen ion implantation. The dataset includes results obtained for as-deposited and nitrogen-ion-implanted samples at different implantation fluences (2×10¹⁶, 1×10¹⁷, and 1×10¹⁸ ions/cm²) and provides a comprehensive view of how ion implantation affects surface and bulk-related properties.