Fig 9
收藏Figshare2017-12-15 更新2026-04-29 收录
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https://figshare.com/articles/dataset/Fig_9/5708206
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资源简介：
Percentage of ALD papers containing a specific word pertaining to substrate materials in their titles. Data for the article "Characterizing the Field of Atomic Layer Deposition: authors, topics, and collaborations"
创建时间：
2017-12-15
