探测器芯片仿真数据

本课题组提出了一种新型波导型探测器芯片设计方案，该方案将波导型探测器芯片的无源结构和有源结构单独设计。课题组采用Silvaco TCAD和Matlab软件基于泊松方程、载流子迁移率模型等半导体器件模型设计芯片的有源结构，得到工作带宽高达45GHz的芯片有源结构；采用Rsoft软件基于光束传播法设计芯片的无源结构，得到高响应度的芯片无源结构，进一步通过Lumerical软件对有源结构和无源结构进行二次验证并整合优化得到最终的波导型探测器芯片结构。Our research team proposes a novel design scheme for waveguide photodetector chips, which separately designs the passive and active structures of the chip. First, the team adopted Silvaco TCAD and Matlab software, based on semiconductor device models including Poisson's equation and carrier mobility models, to design the active structure of the chip, and obtained an active structure with an operating bandwidth up to 45 GHz. Then, Rsoft software was used to design the passive structure of the chip based on the beam propagation method, acquiring a passive structure with high responsivity. Furthermore, Lumerical software was applied to conduct secondary verification and integrated optimization on both the active and passive structures, thereby obtaining the final waveguide photodetector chip structure.

搜集汇总

背景与挑战

背景概述

该数据集提供了新型波导型探测器芯片的仿真结果，其设计将无源结构和有源结构分别进行优化。通过Silvaco TCAD、Matlab、Rsoft和Lumerical等软件仿真，芯片实现了高达45GHz的工作带宽和高响应度。