Non-invasive strain mapping in Si-nitride strain liners on silicon
收藏B2FIND2026-04-25 收录
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https://b2find.eudat.eu/dataset/38cbce1b-1104-5e2d-ac60-fdd50cf34c0f
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We aim for a non-invasive, microscopic characterization of lattice strain that is introduced into silicon by Si-nitride based stress liners for the purpose of enhanced carrier...
