Data for Metasurface-Stabilized Optical Microcavities

Data for Metasurface-Stabilized Optical Microcavities M. Ossiander 1, *, M. L. Meretska1, S. Rourke1,2, C. M. Spaegele1, X. Yin1, I. C. Benea-Chelmus1,3, F. Capasso1, * 1 John A. Paulson School of Engineering and Applied Sciences, Harvard University, 29 Oxford St, Cambridge, MA 02138, USA 2 University of Waterloo, Waterloo, ON N2L 3G1, Canada 3 Hybrid Photonics Laboratory, École Polytechnique Fédérale de Lausanne, Lausanne, CH-1015, Switzerland * Corresponding Authors: [e-mail], [e-mail] Manuscript published as Nature Communications 14, 1114 (2023) https://doi.org/10.1038/s41467-023-36873-7. Contents: A table of contents is given below, please see the individual readme files in the respective folders for a description of the included variables. ./design: design files presented in the manuscript * libs: contains the metaatom libraries * design_c450_h600_g4790_dbrn7_q8_ROC20.0: contains the metasurface design files for the 20 um ROC cavity * design_c450_h600_g4596_dbrn7_q8_ROC20.0_phase_shifted: contains the metasurface design files for the phase shifted 20 um ROC cavity * design_c4.5e-07_h600_dbrn5_mirror_dist10900hologram: contains the metasurface design files for the h-shape cavity * design_c4.5e-07_h600_dbrn5_mirror_dist11050hologram_checkers: contains the metasurface design files for the asymmetric dot pattern cavity ./experimental_data: experimental measurements presented in the manuscript * fabry_perot: contains transmission data for the Fabry-Perot cavity * fundamental_mode_excited: contains transmission data for the cavity containing the 20 um ROC metasurface aligned for maximal fundamental mode excitation * higher_mode_excited: contains transmission data for the cavity containing the 20 um ROC metasurface aligned so also higher transverse modes are excited ./simulation_data: FDTD simulations of metasurface microcavities * fabry_perot_distance: contains simulation data for a Fabry-Perot cavity * reflection_phase: contains simulation data to calculate the frequency penetration depth * roc20um: contains simulation data for the 20 um ROC metasurface cavity, including fabrication tolerance, surface_roughness, and mode_volume data * roc_20um_phase_shifted_distance: contains simulation data for the phase shifted 20 um ROC metasurface cavity * h: contains simulation data for the cavity enhancing the H-shaped mode * asymmetric_dot: contains simulation data for the cavity enhancing the asymmetric dot pattern mode ./SEM: SEM picture of a finalized sample