Frequency selective illumination for high aperture coherence scanning interferometry [Dataset]

This dataset containes raw measurement data from a coherence scanning interferometer of the Linnik type. Two 0.95 NA objectives were used for this measurement. The wavelength used for all these measurements is 450 nm and the step size between every z-step is 20 nm. Information about the different apertures used for the measurements are described in detail in the corresponding publication. IMPORTANT: In case you use the data please cite our corresponding article mentioned below.