Supporting data for the manuscript "A comparative study of non-destructive techniques for estimating dislocation densities in heteroepitaxial AlN layers"
收藏官方服务：
资源简介：
Supporting data for the manuscript "A comparative study of non-destructive techniques for estimating dislocation densities in heteroepitaxial AlN layers"
提供机构：
Zenodo创建时间：
2026-01-22
