Surface-topography challenge (Sample P64)
收藏DataCite Commons2025-02-10 更新2025-04-09 收录
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资源简介：
Atomic force microscopy (AFM) topography images of a chromium nitride (CrN) sample deposited on the rough "backside" of a single-side-polished silicon wafer, which has been subsequently etched with isotropic reactive ion etching. Eight measurements are included with scan sizes of respectively 0.512, 1.024, 2.048, 5.12, 10.24, 25.6, 51.2 and 102.4 μm. All measurements have 512 lines × 512 pixels and the scan rates are 3 lines/s for the scan size of 0.512 μm, 2 lines/s for the scan sizes of 1.024 and 2.048 μm, and 1 lines/s for other scan sizes. The measurements were performed in Tapping mode (amplitude modulation) on a Multimode IIIA AFM by using a ContAl-G probe (BudgetSensors, Bulgaria), which has a nominal tip apex radius of approx. 10 nm.
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contact.engineering
创建时间：
2025-02-10
