Supplementary_Morphology investigation of Metalorganic Vapor-Phase Epitaxyhomoepitaxial (001) β Ga2O3 growth on on-axis and 6{degree sign} off-axis substrates

Name: Supplementary_Morphology investigation of Metalorganic Vapor-Phase Epitaxyhomoepitaxial (001) β Ga2O3 growth on on-axis and 6{degree sign} off-axis substrates
Creator: AIP Publishing
Published: 2026-04-15 12:08:37
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DataCite Commons2026-04-15 更新2026-04-25 收录

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https://aip.figshare.com/articles/dataset/Supplementary_Morphology_investigation_of_Metalorganic_Vapor-Phase_Epitaxyhomoepitaxial_001_Ga2O3_growth_on_on-axis_and_6_degree_sign_off-axis_substrates/31834876/1

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资源简介：

Molecular flow rate O2/Ga ratio Determination

提供机构：

AIP Publishing

创建时间：

2026-04-15