Graphs and figures related to the microstructure properties of black aluminum antireflective films.

The files are related to the manuscript „Microstructure and physical properties of Black-Aluminum antireflective films“ and are organized in the sequence of appearance in the manuscript. The nomenclature of the files follows the sequence:\nFigure, number of the figure appearing in the manuscript (from 1 – 7), type of data (XRD, AFM, TEM, EDX, PALS, Reflectance, Carrier concentration, Electrical mobility, or resistivity), thin film sample related to (R-Al or B-Al), film thickness (60, 180, 250, 320, or 410 nm).\nTEM image files are raw, as collected, while the ones in the manuscript were cropped to show the differences between the films.\n