High-Resolution, Large-Area Fabrication of Compliant Electrodes via Laser Ablation for Robust, Stretchable Dielectric Elastomer Actuators and Sensors

A key
element in stretchable actuators, sensors, and systems based on elastomer
materials are compliant electrodes. While there exist many methodologies
for fabricating electrodes on dielectric elastomers, very few succeed
in achieving high-resolution patterning over large areas. We present
a novel approach for the production of mechanically robust, high-resolution
compliant electrodes for stretchable silicone elastomer actuators
and sensors. Cast, 2–50 μm thick poly­(dimethylsiloxane)
(PDMS)-carbon composite layers are patterned by laser ablation and
subsequently bonded to a PDMS membrane by oxygen plasma activation.
The technique affords great design flexibility and high resolution
and readily scales to large-area arrays of devices. We validate our
methodology by producing arrays of actuators and sensors on up to
A4-size substrates, reporting on microscale dielectric elastomer actuators
(DEA) generating area strains of over 25%, and interdigitated capacitive
touch sensors with high sensitivity yet insensitivity to substrate
stretching. We demonstrate the ability to cofabricate highly integrated
multifunctional transducers using the same process flow, showing the
methodology’s promise in realizing sophisticated and reliable
complex stretchable devices with fine features over large areas.