新型MOCVD氯气清洁功能开发与测试数据集

新型MOCVD氯气清洁功能主要针对Micro-LED应用产出外延片低颗粒度的需求开展开发与测试，根据模拟仿真计算指导，设计了一款出气均匀的氯气喷射装置，同时通过优化工艺参数，实现对腔体内附着的工艺生成物进行原位清洁，提升腔体内的洁净度。该数据集主要采集了外延片的颗粒数据测试报告、工艺运行的记录，以及相关的专利等数据，数据量约为7.05MB。

The novel chlorine cleaning function of MOCVD is developed and tested primarily targeting the demand for low-particle epitaxial wafers in Micro-LED applications. Guided by simulation and calculation results, a chlorine injection device with uniform gas distribution was designed. Meanwhile, by optimizing process parameters, in-situ cleaning of process byproducts attached to the chamber interior was achieved, thereby improving the chamber cleanliness. This dataset mainly collects test reports of epitaxial wafer particle data, process operation records, related patents and other data, with a total data size of approximately 7.05 MB.

搜集汇总

背景与挑战

背景概述

该数据集聚焦于新型MOCVD设备的氯气原位清洁功能开发与测试，旨在降低Micro-LED外延片的颗粒度，提升腔体洁净度。数据集包含了颗粒测试报告、工艺运行记录及相关专利，数据量约7.05MB，格式多样，支持半导体制造工艺的优化研究。