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MOESM1 of Realization of large-scale sub-10Â nm nanogratings using a repetitive wet-chemical oxidation and etching technique

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Figshare2017-03-25 更新2026-04-29 收录
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Additional file 1. Z-drive profiles measured by AFM; the datasets state the measured values of graph in Fig. 3b.

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2017-03-25
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