Nanomechanical phase mapping validated through nano-diffraction on complex metallic films

Lack of testing standards for Nanoindentation fast mapping in the continuous stiffness measurement mode (depth sensing capability) of multiphase materials requires validation by nanodiffraction, to meet the challenges for establishing structure-property relationships. Data would be reusable in new experiments by Artificial Intelligence (AI) to enable fast -mapping by solely utilizing the nanomechanical profile of the material tested with similar composition. The proposal focuses on a complex material developed by PVD on a Si wafer. The thin film is consisted of Cu, Cr, Ti, W, where phases such as metallic glasses, alloys, and immiscible phases of elements are present, with a multi-granular structure. Elastic modulus and hardness mapping in the nanoscale (10-300 nm) will be studied to identify the deformation mechanics of the different metallic phases, combined by ex-situ nanodiffraction for validating phase distribution, and a SOP useable for industry will be documented.