一种耐腐蚀耐磨损低摩擦碳复合薄膜及其制备和在滚动轴承表面的应用

本发明公开了一种耐腐蚀耐磨损低摩擦碳复合薄膜，应用于海洋环境中滚动轴承表面具有优异的耐腐蚀性能、低摩擦系数、长耐磨寿命等特点，属于真空镀膜技术领域和轴承表面处理技术领域。本发明采用闭合磁场‑多靶溅射沉积技术，以Ti和石墨为溅射靶材，氩气为溅射气体，甲烷为反应气体，通过反应+溅射共沉积的方法制备而成，其结构自工件表面由内向外依次为Ti粘接层，TiN承载层，TiNC梯度层，TiC/C功能层，这种多层梯度渐变结构有效提高了薄膜承载能力和耐磨损性能；同时，功能层纳米晶TiC/非晶碳的弥散强化作用提高了薄膜耐腐蚀性能和低摩擦性能，应用于滚动轴承表面可提高轴承在腐蚀环境中的长寿命和高可靠润滑服役性能。

This invention discloses a corrosion-resistant, wear-resistant and low-friction carbon composite film. Designed for application on the surfaces of rolling bearings in marine environments, this film exhibits excellent corrosion resistance, low friction coefficient and prolonged wear life, and falls within the technical fields of vacuum coating and bearing surface treatment. This invention adopts closed-field multi-target sputtering deposition technology, and fabricates the film through co-deposition combining reactive sputtering and conventional sputtering, using Ti and graphite as sputtering targets, argon as the sputtering gas, and methane as the reactive gas. The film's structure, starting from the workpiece surface and extending outward, sequentially comprises a Ti adhesive layer, a TiN load-bearing layer, a TiNC gradient layer, and a TiC/C functional layer. This multi-layer gradient structure effectively enhances the load-bearing capacity and wear resistance of the film. Meanwhile, the dispersion strengthening effect of nanocrystalline TiC/amorphous carbon in the functional layer improves the film's corrosion resistance and low-friction performance. When applied to rolling bearing surfaces, it can extend the service life and ensure highly reliable lubrication service performance of bearings in corrosive environments.