Deposition rate of nanoparticles for different sputtering conditions
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Deposition rate for different pressure values at frequency = 1000 Hz and mean power P = 40 W. Deposition rate for different mean power at pressure of 20 Pa and pulse length of 50 µs. Deposition rate for different frequencies at a pressure of 20 Pa and a mean power of 40 W
创建时间：
2025-05-19
