Structural study of SiC//SiC interface made by wafer direct bonding
收藏ESRF Portal2025-01-01 更新2026-04-23 收录
下载链接:
https://doi.esrf.fr/10.15151/ESRF-ES-744173027
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资源简介:
We wish to study the silicon carbide/silicon carbide interfaces using high energy reflectometry and grazing incidence scattering. The aim of the proposed study is to follow the thermal evolution of these interfaces. This knowledge is a prerequisite to understand the electrical properties of such assemblies and design new processes to make higher performance devices based on silicon carbide.
提供机构:
Francois RIEUTORD
创建时间:
2025-01-01



