Raw measurement data of SLM calibration: Inline calibration of spatial light modulators in nonlinear microscopy

The raw data files of the phase and amplitude response calibration of a spatial light modulator (SLM, Meadowlark 1920x1152 XY Phase Series). We have calibrated the SLM with two different methods: a Twymann-Green (TG) interferometric setup with Fourier fringe analysis, and our new inline calibration method. The new inline method is suitable for nonlinear microscopy. For both calibration methods, the same laser (Spectra-Physics, Mai Tai) was used at a wavelength of 804nm, but with different output powers and operational modes. The TG measurement was performed with low laser output power (0.14 W) in continuous wave (CW) mode, while our inline measurement was performed at high laser output power (2.6 W) in pulsed mode.

本数据集包含空间光调制器（Spatial Light Modulator，SLM，Meadowlark 1920×1152 XY相位系列）的相位与振幅响应校准原始数据文件。本次校准采用两种不同方案：一是结合傅里叶条纹分析的泰曼-格林（Twymann-Green，TG）干涉测量装置，二是本研究提出的新型在线校准方法，该方法适用于非线性显微镜成像场景。两种校准方法均使用光谱物理（Spectra-Physics）公司迈泰（Mai Tai）激光器，工作波长为804nm，但激光输出功率与运行模式存在差异：泰曼-格林测量采用连续波（CW）模式，输出功率为0.14W；在线校准则采用脉冲模式，输出功率为2.6W。