Wafer Surface Defect

The dataset is a self-constructed wafer surface defect dataset, with each image captured in real-time. The extraction and segmentation of wafer image have been performed, and each image represents a single individual die. The dataset primarily includes images of defect-free dies, as well as four types of defective images: particle, scratch, stain, and liquid residual. A total of 500 images are included, and the various types of defects within the images have been annotated using the Make Sense online annotation tool. The location and category information of the defects are stored in YOLO format as txt files. Each image has a resolution of 680×680 pixels.

本数据集为自主构建的晶圆表面缺陷数据集，所有图像均为实时采集所得。已完成晶圆图像的提取与分割处理，每张图像对应单个独立裸片（die）。数据集主要涵盖无缺陷裸片图像，以及四类缺陷图像：颗粒缺陷、划痕缺陷、污渍缺陷与残液缺陷。本数据集共计包含500张图像，图像内的各类缺陷均通过Make Sense在线标注工具完成标注。缺陷的位置与类别信息以YOLO格式存储为txt文本文件。每张图像的分辨率为680×680像素。

搜集汇总

背景与挑战

背景概述

该数据集是一个包含500张晶圆表面图像的集合，涵盖无缺陷和四种常见缺陷类型（颗粒、划痕、污渍和液体残留），所有图像已进行标注并存储为YOLO格式，适用于机器学习和计算机视觉研究。