Dataset for Hybrid Approach to Reconstruct Nanoscale Grating Dimensions using Scattering and Fluorescence with Soft X-rays

This dataset accompanies the paper titled "Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays" in Nanoscale, 2025,17, 6017-6029 (https://doi.org/10.1039/D4NR04580G). It includes measurement data, optimization results and fit data collected from a nanoscale grating with a soft X-ray fluorescence scatterometer, a model of the experiment and weighted, combined regression.