Dataset for "Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-Ray Transparent Samples"

Dataset associated with the publication "Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-Ray Transparent Samples" by Sina Mayr ^1,2,*, Simone Finizio ¹, Joakim Reuteler ³, Stefan Stutz ¹, Carsten Dubs ⁴, Markus Weigand ⁵, Aleš Hrabec ^1,2,6, Jörg Raabe ¹ and Sebastian Wintz ^1,7,*. ¹ Paul Scherrer Institut, 5232 Villigen PSI, Switzerland ² Laboratory for Mesoscopic Systems, Department of Materials, ETH Zurich, 8093 Zurich, Switzerland ³ Scientific Center for Optical and Electron Microscopy, ETH Zurich, 8093 Zurich, Switzerland ⁴ INNOVENT e.V. Technologieentwicklung Jena, 07745 Jena, Germany ⁵ Helmholtz-Zentrum Berlin, 14109 Berlin, Germany ⁶ Laboratory for Magnetism and Interface Physics, Department of Materials, ETH Zurich, 8093 Zurich, Switzerland ⁷ Max Planck Institute for Intelligent Systems, 70569 Stuttgart, Germany