Additional Tool Family Sensor Data
收藏arXiv2025-09-30 收录
下载链接:
https://github.com/Seagate/softsensing_data
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资源简介:
该数据集包含了来自不同制造工具家族的传感器数据,每个家族都有不同的加工阶段以及相应的测量数据。数据涵盖了各个工具家族特有的不同加工阶段及测量信息。规模根据不同的工具家族而有所变化。任务的性质为多任务分类(二元分类)。
This dataset contains sensor data from different manufacturing tool families, each of which has distinct machining stages and corresponding measurement data. The data covers unique machining stages and measurement information specific to each tool family, with the dataset scale varying across different tool families. The task type is multi-task classification, specifically binary classification.
提供机构:
Seagate Technology



