Pumpdown curves of samples tested for vacuum compatibility during the development of electroless copper on SLA resin electron and ion device manufacturing process
收藏DataCite Commons2026-03-02 更新2026-05-04 收录
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https://repod.icm.edu.pl/citation?persistentId=doi:10.18150/P2BNC1
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资源简介：
The archive contains a series of files with recordings of pressure during the pumpdown of a test vacuum chamber described in related paper. The pressure was measured with a Pfeiffer Vacuum PKR 251 vacuum gauge and recorded (as voltage) with a Siglent SDM 3055-SC multimeter.
提供机构：
RepOD
创建时间：
2026-02-27
