Arrival clouds, control calculations and code: Monte Carlo test of mean-free-path scaling for sputtered Cu, Ti and W atoms in argon

Data and code supporting the manuscript "Does Mean Free Path Organize the Arrival of Sputtered Atoms? A Monte Carlo Test for Cu, Ti and W in Argon" (Avdelkader Bouazza, L2GEGI Laboratory, University of Tiaret, Algeria). SUMMARYArrival energy-angle clouds of sputtered Cu, Ti and W atoms transported through argon, generated by Monte Carlo simulation, together with the code, scripts and machine-readable results used in the paper. The study tests whether expressing the target-substrate distance in mean free paths (chi = L/lambda) makes the joint distribution of arrival energy and incidence angle the same for different materials, and which material property controls the differences. MODELPoint source on the target axis; cosine emission law; Thompson energy spectrum with E_ion = 500 eV; energy-independent hard-sphere mean free path in argon at 300 K; isotropic centre-of-mass elastic scattering from stationary argon atoms; coaxial disk substrate of radius L/5; chamber radius 0.15 m; thermalization below 1.5 k_B T; 300-step cap. Real-gas and collisionless (ballistic) runs of a seed share random numbers. Pressures 0.2, 0.5, 1, 2, 3 and 5 Pa; seeds 61001, 61002, 61003; 10^6 emitted particles per file. Two emission cutoffs are provided: E_max = 0.5 gamma E_ion (baseline) and E_max = gamma E_ion, where gamma = 4 m_Ar m / (m_Ar + m)^2. FILES (9)1. clouds_production_baseline_cutoff.zip - 216 production clouds (Cu, Ti, W; chi = 4, 8; real-gas and ballistic), E_max = 0.5 gamma E_ion.2. clouds_production_gammaEion_cutoff.zip - 216 production clouds, E_max = gamma E_ion.3. clouds_control_baseline_cutoff.zip - 432 one-factor control clouds: Cu with a single property replaced (mass 47.867, 100, 183.84 or 300 u, or binding energy 4.85 or 8.68 eV), E_max = 0.5 gamma E_ion.4. clouds_control_gammaEion_cutoff.zip - 288 control clouds (four variants), E_max = gamma E_ion.5. clouds_decoupled_control.zip - 144 real-gas clouds in which the mass used in the collisions and the emission cutoff are varied separately.6. clouds_same_gamma_twins.zip - 72 real-gas clouds for masses with the same energy-transfer factor gamma (25.1 u and 8.68 u).7. clouds_chi1_chi2.zip - 108 real-gas clouds at chi = 1 and 2 (chi = 4 and 8 are in the production files).8. clouds_matched_Gamma.zip - 108 real-gas clouds with matched Gamma = chi*gamma (L = Gamma*lambda/gamma).9. Reproducibility_archive_v3_corrected.zip- transport and analysis code, production and control results tables for both cutoffs, scripts for every figure, the analytic verification scripts of the transport code and their results, file hashes, environment description and README.Each cloud zip contains MANIFEST.csv (geometry, arrival counts, SHA-256), SHA256SUMS.txt and README.md. FILE FORMATNumPy .npz files named REAL_<material or variant>_P<pressure in Pa>_chi<value>_seed<seed>.npz (REAL = real-gas transport, BALL = collisionless transport). Each file holds E_arr (kinetic energy in eV of each atom reaching the substrate) and theta_arr (arrival angle in degrees from the substrate normal, 0-90). Control files store only these two arrays. REPRODUCIBILITYAll clouds can be regenerated from the code and seeds in the archive (regen.py, ext_run.py and the scripts named in the README). Regenerated baseline production clouds are byte-identical to the deposited files, and the production, control, decoupled, same-gamma, chi-scan and matched-Gamma divergence results were reproduced exactly (maximum relative difference 0.0). The analytic verification of the transport code (uncollided arrival fraction, mean energy after n collisions, collision kinematics, sampling distributions) is included and reproduces its stored results exactly. Environment: Python 3.12, numpy 2.4.4, scipy 1.17.1 (see ENVIRONMENT.txt). LIMITSThe data come from a reduced computational model (hard-sphere, energy-independent cross section; cosine and Thompson emission; uniform argon). No experimental validation is claimed. HOW TO CITECite this dataset together with the manuscript above.